[28p-D3-1~17] 6.1 Ferroelectric thin films

[28p-D3-6] Property change with applying repeated electric field in Pb(Zr,Ti)O₃ films for piezoelectric MEMS application

^○Ayumi Wada¹, Yoshitaka Ehara¹, Shintaro Yasui¹, Mitsumasa Nakajima¹, Takahiro Oikawa¹, Takeshi Kobayashi², Hitoshi Morioka³, Hiroshi Funakubo¹ (Tokyo Tech.¹, AIST², Bruker AXS³)

Keywords:圧電体、MEMS、PZT