The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[28p-F2-1~19] 6.3 Oxide-based electronics

Thu. Mar 28, 2013 2:00 PM - 7:00 PM F2 (E3 3F-303)

[28p-F2-4] Carrier Density Modulation of Oxide interfaces by Air-Gap Gate Dielectric

○Tomoki Tambo1, Yusuke Kozuka1, Joseph Falson2, Atsushi Tsukazaki2,3, Masashi Kawasaki1 (Univ. Tokyo, Dept. Appl. Phys.1, Univ. Tokyo, Dept. Adv. Mater. Sci.2, JST-PRESTO3)

Keywords:ZnO、FET、Air-Gap