[28p-F2-1~19] 6.3 Oxide-based electronics

[28p-F2-7] Characteristics of metal/oxide multilayer films fabricated by magnetron sputter-deposition

^○Yuta Gotoh¹, Yousuke Haba¹, Takahisa Ichinohe¹ (Tokyo National Collage of Technology¹)

Keywords:透明導電膜、Ti、多層膜