[28p-G10-1~8] High sensitivity sensing technology with superconducting devices

[28p-G10-1] New Possibilities opened by Transition-Edge-Sensing X-ray Microcalorimeter in Analytical Electron Microscopy

^○Syo Matsumura¹, Keisuke Maehata¹, Keiichi Tanaka², Toru Hara³, Kazuhisa Mitsuda⁴ (Kyushu Univ.¹, Hitachi High-Tech Sci.², NIMS³, JAXA⁴)

Keywords:X線分析、電子顕微鏡