[28p-G10-1~8] High sensitivity sensing technology with superconducting devices

[28p-G10-7] Fabrication and Evaluation of NbN-based Microwave Kinetic Inductance Detectors in Terahertz Band

^○Seiichiro Ariyoshi^1,2, Kensuke Nakajima³, Atsushi Saito³, Kento Hayashi³, Tohru Taino⁴, Hiroyuki Tanoue⁴, Horonobu Yamada³, Shigetoshi Ohshima³, Chiko Otani², Jongsuck Bae¹ (Nagoya Inst. Tech.¹, RIKEN², Yamagata Univ.³, Saitama Univ.⁴)

Keywords:テラヘルツ、力学インダクタンス検出器