[28p-G12-1~12] Synthesis & Characterization of 2 dimensional layered materials

[28p-G12-12] Fabrication and Electrical Characterization of Thin Films of Transition Metal Dichalcogenides using 'Nanomanipulator' in SEM

^○Atsushi Ando¹, Tetsuo Shimizu¹, Hiroshi Suga^2,1, Yukinori Morita¹, Yusuke Tabata³, Keiji Ueno³ (AIST¹, CIT², Saitama Univ.³)

Keywords:遷移金属ダイカルコゲナイド