[28p-G16-1~15] 12.10 Nanobiotechnology

[28p-G16-15] Low-Energy-Loss thin Si film MEMS Resonator by Metal-Induced Lateral Crystallization using Ni Ferritin

Takashi Tomikawa¹, ^○Shinya Kumagai^1,3, Ichiro Yamashita^2,3, Yukiharu Uraoka^2,3, Minoru Sasaki^1,3 (Toyota Technol. Inst.¹, NAIST², CREST JST³)

Keywords:Si薄膜振動子、金属誘起横方向結晶成長、フェリチン