[28p-G19-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28p-G19-11] Optical characterization of nitrogen-doped Mg_xZn_1-xO thin films

^○Takami Abe¹, Akira Nakagawa¹, Tetsuya Chiba¹, Michiko Nakagawa¹, Shuzo Takahashi¹, Shigeki Chiba¹, Yasuhiro Kashiwaba², Masahiro Daibo¹, Ikuo Niikura¹, Yasube Kashiwaba¹, Tamiya Fujiwara¹, Hiroshi Osada¹ (Iwate Univ.¹, Sendai Nat. College of Tech.²)

Keywords:MgZnO、分光エリプソメトリー