[28p-G19-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28p-G19-3] Effect of low-temperature buffer layer on the properties of ZnO films grown on glass substrates using high-energy H₂O generated by a catalytic reaction

^○Kazuki Takezawa¹, Takahiro Oyanagi¹, Takahiro Kato¹, Hironori Katagiri², Kazuo Jimpo², Koichiro Ohishi², Kanji Yasui¹ (Nagaoka Univ. Technol.¹, Nagaoka Nat. Coll. Technol.²)

Keywords:酸化亜鉛