[28p-G21-1~12] 15.4 III-V-group nitride crystals

[28p-G21-10] Effect of a thin AlN/GaN superlattice interlayer on the strain of GaN grown on Si(111) substrates

^○Xuqiang Shen¹, Tokio Takahashi¹, Tepei Uetake¹, Yuichi Sakamura¹, Toshihide Ide¹, Mitsuaki Shimizu¹ (AIST¹)

Keywords:GaN、Strain、Superlattice