[28p-G21-1~12] 15.4 III-V-group nitride crystals

[28p-G21-11] Hetero epitaxial growth of AlO_x/AlN/GaN structures by in-situ RF-MBE

^○Yohei Sugiura^1,2, Tomohiro Yamaguchi¹, Tohru Honda¹, Masataka Higashiwaki^2,3 (Kogakuin Univ.¹, NICT², JST PRESTO³)

Keywords:MBE、酸化物、窒化物