[28p-G21-1~12] 15.4 III-V-group nitride crystals

[28p-G21-12] Lattice Constant of AlN and GaN Thin Films on Al2O3 Grown by MBE Using NH3-CIB

^○Hiroshi Saito¹, Kazuaki Imai², Kazuhiko Suzuki² (Okayama Univ. of Science¹, Hokkaido Inst. of Technology²)

Keywords:IIi-V族窒化物、アンモニアクラスターイオンビーム