[28p-G22-1~19] 15.6 IV-group-based compounds

[28p-G22-15] △Evaluation of 4H-SiC surfaces after reactive ion etching by the μ-PCD method

^○Yuto Mori¹, Masashi Kato¹, Masaya Ichimura¹ (Nagoya Inst. of Tech.¹)

Keywords:4H-SiC、μ-PCD法、反応性イオンエッチング