[28p-G22-1~19] 15.6 IV-group-based compounds

[28p-G22-4] △Frabrication and Characterization of n-Si/n-4H-SiC heterojunctions by Using Surface-Activated Bonding

^○Jianbo Liang¹, Tatusya Miyazaki¹, Syouta Nisida¹, Masasi Morimoto¹, Naoteru Shigekawa¹ (Osaka City University¹)

Keywords:表面活性化ボンディング、4H-SiC