[28p-G6-1~17] 13.5 Si process technology

[28p-G6-16] △Control of Si Lateral Growth Direction by Laser Spot’s Long Axis Inclinationes

^○（B）Ryota Morioka¹, Wenchang Yeh¹ (Shimanedai sougourikou¹)

Keywords:レーザ結晶化