[28p-G8-1~14] 13.2 Semiconductor surfaces

[28p-G8-4] In Situ XPS Observation of GeO₂/Ge Structures under Controlled Relative Humidity: Dependence of Relative Humidity on Ge3d Spectra

^○Kenta Arima¹, Atsushi Mura¹, Iori Hideshima¹, Takuji Hosoi¹, Heiji Watanabe¹, Zhi Liu² (Osaka Univ.¹, Lawrence Berkeley Nat. Lab.²)

Keywords:ゲルマニウム酸化物、X線光電子分光、濡れ性