The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[28p-G9-1~18] 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

[28p-G9-16] Self-Heating Effects and Analog Performance Optimization of FinFETs

○（D）Tsunaki Takahashi1,2, Nobuyasu Beppu1,2, Shunri Oda3, Ken Uchida1,2 (Dept. of Physical Electronics, Tokyo Inst. of Tech.1, Dept. of Electrical and Electronics, Keio Univ.2, QNERC, Tokyo Inst. of Tech.3)

Keywords:FinFET、自己加熱効果、アナログ特性