The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[28p-G9-1~18] 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

[28p-G9-18] Mobility Enhancement for Ge p-MOSFET with HfGe Metal Source/Drain

○Takahiro Sada1, Keisuke Yamamoto2,3, Dong Wang1, Hiroshi Nakashima2 (I-EggS, Kyushu Univ.1, KASTEC, Kyushu Univ.2, JSPS Research Fellow3)

Keywords:Ge、Schottky contact、MOSFET