The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[28p-G9-1~18] 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

[28p-G9-7] Electronic structure of S-pair metallizing Si

○Koichi Kato1, Takao Marukame1, Yoshifumi Nishi1, Yuichiro Mitani1 (Toshiba R&D Cent.1)

Keywords:硫黄、ショットキー、バリヤ