Experimental Study on 2D-Si Layers for Future Several-nm CMOS (I)

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

^○Yuta Nakahara¹, Yussuke Nagata¹, Takashi Aoki¹, Toshiyuki Sameshima¹, Tomohisa Mizuno¹ (Kanagawa Univ.¹)

Keywords:CMOS