The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[28p-G9-1~18] 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

[28p-G9-9] Experimental Study on 2D-Si Layers for Future Several-nm CMOS (II)

Yusuke Nagata1, Yuta Nakahara1, Takashi Aoki1, Toshiyuki Samejima2, Tomohisa Mizuno1 (Kanagawa Univ.1, Tokyo Univ. Agri. Tech.2)

Keywords:半導体