Experimental Study on 2D-Si Layers for Future Several-nm CMOS (II)

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

^○Yusuke Nagata¹, Yuta Nakahara¹, Takashi Aoki¹, Toshiyuki Samejima², Tomohisa Mizuno¹ (Kanagawa Univ.¹, Tokyo Univ. Agri. Tech.²)

Keywords:半導体