[28p-PA1-1~34] 15.4 III-V-group nitride crystals

[28p-PA1-11] Spatial Distribution of Cathodoluminescence in Si-doped AlGaN Epitaxial Layers Grown by LP-MOVPE

^○Satoshi Kurai¹, Fumitaka Ushijima¹, Koji Anai¹, Ayumu Wakamatsu¹, Hideto Miyake², Kazumasa Hiramatsu², Yoichi Yamada¹ (Yamaguchi Univ.¹, Mie Univ.²)

Keywords:カソードルミネッセンス、AlGaN