[28p-PA1-1~34] 15.4 III-V-group nitride crystals

[28p-PA1-17] △GaN growth on narrow sputtered AlN stripes on (111) Si substrates

^○Tadashi Mitsunari¹, Kengo Nawa¹, Takaya Yamada¹, Yoshio Honda¹, Masahito Yamaguchi¹, Hiroshi Amano^1,2 (Nagoya Univ.¹, Akasaki Research Center²)

Keywords:GaN、スパッタ、Si基板