[28p-PA1-1~34] 15.4 III-V-group nitride crystals

[28p-PA1-28] Study on AlGaN/GaN growth on carbonized Si substrate

^○Tatsuya Sakamoto^1,2, Shigeaki Wakabayashi^1,2, Tokio Takahashi², Toshihide Ide², Mitsutoshi Shimizu², Yoshihumi Takanashi¹ (Tokyo University of Science¹, Advanced Industrial Science and Technology²)

Keywords:GaN、MOCVD