[28p-PA1-1~34] 15.4 III-V-group nitride crystals

[28p-PA1-31] Growth of AlN on Rough SiC Substrate by Sublimation Method

^○Katsushi Nishino¹, Yuichi Hiwasa¹, Shota Iwamoto¹, Kotaro Hayashi¹, Masashi Tsukihara² (The Univ. of Tokushima¹, Ushio Inc.²)

Keywords:窒化アルミニウム、昇華法