[28p-PA2-1~4] 15.5 IV-group crystals and IV-IV-group mixed crystals

[28p-PA2-2] Acceptor-Like States in SiGe Alloy Related to Point Defects Induced by Si⁺ Ion Implantation

^○（D）Motoki Satoh¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Kentarou Sawano², Yasuhiro Shiraki² (CCST Univ. of Yamanashi¹, ARL Tokyo City Univ.²)

Keywords:SiGe、poind defects