[28p-PA2-1~4] 15.5 IV-group crystals and IV-IV-group mixed crystals

[28p-PA2-4] Investigations on growths and defect generation processes in silicon-carbon alloys grown using gas-source MBE

^○Hiroshi Furukawa¹, Shoichiro Sakai¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Yusuke Hoshi², Noritaka Usami² (CCST Univ. of Yamanashi¹, IMR Tohoku Univ.²)

Keywords:半導体、Si1-xCx、圧縮歪みSi