[28p-PA8-1~26] 12.9 Organic transistors

[28p-PA8-15] Influence of Gate Dielectric Film Surface Roughness in Organic TFTs Fabricated by Photolithography Process

^○Shinya Oku^1,2, Tatsuya Suzuki¹, Makoto Mizukami^1,2, Shizuo Tokito^1,3 (Grad. School of Science and Engineering, Yamagata Univ.¹, Innovation Center for Org. Electron., Yamagata Univ.², Research Center for Org. Electron., Yamagata Univ.³)

Keywords:有機トランジスタ、フォトリソグラフィ、ディスプレイ