[28p-PB3-1~15] 6.2 Carbon-based thin films

[28p-PB3-7] Fabrication of Amorphous Carbon Film by RF Plasma CVD Method from CO Gas

^○Yuki Yasuoka¹, Toru Harigai¹, Koyo Iwasa¹, Hiroshi Furuta^1,2, Akimitsu Hatta^1,2 (Kochi Univ. Technol.¹, Inst. Nanotechnol., Kochi Univ. Technol.²)

Keywords:アモルファスカーボン、CVD、一酸化炭素