[28p-PB3-1~15] 6.2 Carbon-based thin films

[28p-PB3-9] Morphological change of carbon film surface through thermal annealing

^○Yun Jeong Choi¹, Takuro Tomita^1,2, Yoshiki Naoi^1,2 (ATS¹, STS²)

Keywords:carbon、anneal