The 60th JSAP Spring Meeting,2013

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Regular sessions(Poster presentation)

06. Thin Films and Surfaces » 6.5 Surface physics and vacuum

[28p-PB4-1~15] 6.5 Surface physics and vacuum

Thu. Mar 28, 2013 4:00 PM - 6:00 PM PB4 (2nd gymnasium)

[28p-PB4-6] △AFM observation of void structures in thick oxide layer on silicon substrate

○Taichi Yoshida1, Takayuki Nagai1, Yoshiharu Enta1 (Hirosaki Univ.1)

Keywords:シリコン酸化膜、熱脱離、ボイド構造