[29a-A4-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

[29a-A4-11] Fabrication of a-Si/c-Si Hetero-Junction Diodes Using Low-Temperature Doping

^○Shogo Tsuzaki¹, Koichi Koyama^1,2, Keisuke Ohdaira¹, Hideki Matsumura^1,2 (JAIST¹, JST CREST²)

Keywords:ヘテロ接合、低温ドーピング