[29a-A4-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

[29a-A4-5] Preparation and evaluation of Al₂O₃:H films by reactive sputtering method

^○Hiroshi Ito¹, Yoshio Kawamata², Masanori Ohyama³ (Tokyo National College of Tech.¹, Shibaura Mechatro. Co.², Kyoritsu Co.³)

Keywords:スパッタリング、酸化アルミニウム、パッシベーション膜