[29a-A4-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

[29a-A4-6] ▼Passivation Quality of A SiNx Single Passivation Layer on Crystalline-Si Prepared by Cat-CVD

^○Cham Thi Trinh¹, Koichi Koyama^1,2, Ohdaira¹, Hideki Matsumura^1,2 (Japan Advanced Institute of Science and Technology¹, Japan Science and Technology Agency (JST)²)

Keywords:Silicon nitride SiNx、Passivation layers、Cat-CVD