The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[29a-B2-1~8] 7.6 Ion beams

Fri. Mar 29, 2013 10:00 AM - 12:00 PM B2 (K2 3F-1302)

[29a-B2-2] △Texture control of hexagonal films using energetic positive ion irradiation by RF bias sputtering

○Shinji Takayanagi1, Takahiko Yanagitani2, Mami Matsukawa1 (Doshisha Univ.1, Nagoya Inst. Tech.2)

Keywords:イオン照射、配向制御、酸化亜鉛