The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[29a-B2-1~8] 7.6 Ion beams

Fri. Mar 29, 2013 10:00 AM - 12:00 PM B2 (K2 3F-1302)

[29a-B2-8] MD simulations of huge fluorine cluster impacts on silicon trench structure

○Takaaki Aoki1, Toshio Seki1, Jiro Matsuo1 (Kyoto Univ.1)

Keywords:MD simulation、クラスター、エッチング