[29a-B5-1~11] 1.9 Ultrasonic

[29a-B5-4] △Evaluation of Piezoelectric Ta₂O₅ Thin Films Deposited on Al₂O₃ Substrates

^○Shunsuke Iwamoto¹, Ryosuke Saigusa¹, Shoji Kakio¹ (Yamanashi Univ.¹)

Keywords:圧電性