[29a-B5-1~11] 1.9 Ultrasonic

[29a-B5-7] Measurement of trace water vapor using ball SAW sensor

^○Satoshi Hagihara¹, Tomohiro Saito¹, Ryosuke Mihara¹, Toru Oizumi¹, Nobuo Takeda¹, Shingo Akao^1,2, Tsuneo Ohgi², Takayuki Yanagisawa², kousuke Takayanagi², Noritaka Nakaso², Toshihiro Tsuji¹, Yusuke Tsukahara², Kazushi Yamanaka¹ (Tohoku University¹, TOPPAN PRINTING Co. LTD²)

Keywords:弾性表面波、水晶、水蒸気センサ