[29a-B5-1~11] 1.9 Ultrasonic

[29a-B5-6] Measurement of H2 in Air using Ball SAW Sensor with Pd-Pt alloy film

^○Tsuji Toshihiro¹, Ryosuke Mihara¹, Tomohiro Saito¹, Hagihara Satoshi¹, Oizumi Toru¹, Takeda Nobuo¹, Tsuneo Ohgi², Takayuki Yanagisawa², Shingo Akao^1,2, Nakaso Noritaka², Kazushi Yamanaka¹ (Tohoku Univ.¹, TOPPAN PRINTING²)

Keywords:弾性表面波、水素ガスセンサ、Pd