[29a-B7-1~12] 8.5 Plasma nanotechnology

[29a-B7-3] △Synthesis of Highly Crystalline Graphene on Copper by Plasma-Enhanced Chemical Vapor Deposition

^○Yoshihiro Miyawaki¹, Kazuya Sano¹, Yasuaki Hayashi¹ (Kyoto Inst. Tech.¹)

Keywords:グラフェン、プラズマ、CVD