[29a-B7-1~12] 8.5 Plasma nanotechnology

[29a-B7-4] Synthesis of Carbon Nanotubes on Surface of Metal Particles in C4F8 - added CH4/H2 Plasmas

^○（M1）Masanari Kuroda¹, Tomoya Isemura¹, Kazuo Takahashi¹, Koji Nishio² (Electronics,Kyoto Institute of Technology¹, Mathematical and Physical Sciences, Kyoto Institute of Technology²)

Keywords:カーボンナノチューブ、金属微粒子、プラズマCVD