[29a-B7-1~12] 8.5 Plasma nanotechnology

[29a-B7-8] Deformation of DLC Nanostructures by Etching after Sputtering

^○Toru Harigai¹, Koyo Iwasa¹, Yoshiaki Kakuta¹, Hiroshi Furuta^1,2, Akimitsu Hatta^1,2 (Kochi Univ. Technol.¹, Inst. Nanotechnol., Kochi Univ.²)

Keywords:ナノ構造体、DLC、エッチング