[29a-B8-1~10] 8.2 Plasma measurements and diagnostics

[29a-B8-7] △Wavelength Dependence on Substrate Temperature Measurement Using Low Coherence Interferometer

^○Hiroto Kato¹, Kyohei Shibata¹, Takayuki Ohta¹, Takayoshi Tsutsumi², Masaru Hori², Masafumi Ito¹ (Meijo Univ.¹, Nagoya Univ.²)

Keywords:低コヒーレンス干渉計