[29a-C1-1~11] 4.2 Photonic nonostructures and phenomena

[29a-C1-5] △Wide range Q-factor control in a photonic crystal nanobeam cavity built in MEMS

^○（DC）Ryuichi Ohta¹, Yasutomo Ota¹, Naoto Kumagai¹, Satomi Ishida¹, Satoshi Iwamoto¹, Yasuhiko Arakawa¹ (NanoQuine, IIS Univ. of Tokyo¹)

Keywords:フォトニック結晶、MEMS