[29a-D2-1~9] 4.7 Laser processing

[29a-D2-6] Patterned growth of ZnO nanowalls by laser patterning of the buffer layer

^○Yuuki Muraoka¹, Tatsuro Sugie¹, Tetsuya Shimogaki¹, Mitsuhiro Higashihata¹, Daisuke Nakamura¹, Yoshiki Nakata², Tatsuo Okada¹ (Graduate School of Information Science and Electrical Engineering, Kyushu Univ.¹, Institute of Laser Engineering, Osaka Univ.²)

Keywords:レーザー・プロセッシング、ZnO