[29a-F1-1~9] 6.4 New thin-film materials

[29a-F1-7] ▲Dependence on Film Thickness of the Electrical Properties of ZnO Thin Films Grown Using High-Energy H₂O Generated by a Catalytic Reaction

^○Kanji Yasui¹, Eichi Nagatomi¹, Naoya Yamaguchi¹, Souichi Satomoto¹, Takahiro Kato¹ (Nagaoka Univ. Technol.¹)

Keywords:ZnO