The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[29a-F2-1~11] 6.3 Oxide-based electronics

Fri. Mar 29, 2013 10:00 AM - 1:00 PM F2 (E3 3F-303)

[29a-F2-9] Recovery of Etching Damage by Soft X-ray Irradiation Observed in XAS spectra of TiO2 Thin Films II

Masahito Niibe1, Keiji Sano1, Takuya Kotaka1, Retsuo Kawakami2, Kikuo Tominaga2, Yoshitaka Nakano3 (Univ. Hyogo1, Univ. Tokushima2, Chubu Univ.3)

Keywords:酸化チタン、NEXAFS、エッチングダメージ