[29a-F2-1~11] 6.3 Oxide-based electronics

[29a-F2-9] Recovery of Etching Damage by Soft X-ray Irradiation Observed in XAS spectra of TiO2 Thin Films II

^○Masahito Niibe¹, Keiji Sano¹, Takuya Kotaka¹, Retsuo Kawakami², Kikuo Tominaga², Yoshitaka Nakano³ (Univ. Hyogo¹, Univ. Tokushima², Chubu Univ.³)

Keywords:酸化チタン、NEXAFS、エッチングダメージ