[29a-G10-1~11] 17.3 Exploration of new functions and evaluation of basic properties

[29a-G10-2] △Formation of Multi-Layer Graphene/Ni Catalyst Layered Wiring and its Characteristics

^○taishi Ishikura¹, Makoto Wada¹, Atsunobu Isobayashi¹, Daisuke Nishide¹, Takashi Matsumoto¹, Ban Ito¹, Yuichi Yamazaki¹, Masahito Watanabe¹, Naoshi Sakuma¹, Akihiro Kajita¹, Tadashi Sakai¹ (Low-power Electronics Association & Project (LEAP)¹)

Keywords:LSI配線、グラフェン、半導体デバイス